Mved (micro Vacuum Electronic Devices) 193-nm Lithography 3d Micro/nanomanipulation with Force Spectroscopy

Amicromanipulation system is a robotic device which is used to physically interact with a sample under a microscope, where a level of precision of movement is necessary that cannot be achieved by the unaided human hand It is well known that pick-and-place is very important for 3-D microstructure fabrication since it is an indispensable step in the bottom-up building process. The main difficulty in sufficiently completing such pick-and-place manipulation at this scale lies in fabricating a very sharp end-effector that is capable of smoothly releasing microobjects deposited on the substrate. Moreover, this end-effector has to provide enough grasping force to overcome strong adhesion forces [1–3] from the substrate as well as being capable of sensing and controlling interactions with the microobjects. Furthermore, compared with the manipulation of larger microobjects under an optical microscope, visual feedback at several microns more suffers from the shorter depth of focus and the narrower field of view of lenses with high magnifications, although different schemes or algorithms have been introduced on techniques of autofocusing [4, 5] and extending focus depth [7]. Compared with vision-based automated 2-D micromanipulation, automated 3-D micromanipulation at the scale of several microns to submicron scale is more challenging because of optical microscope’s resolution limit (typically 200 nm). Moreover, additional manipulation feedback is needed that is beyond the capability of optical vision, such as in the cases of vertical contact detection along the optical axis or manipulation obstructed by opaque components. Therefore, multi-feedback is of vital